High Resolution
EUV Wavelength
Tunable Light Source and Detection System
The 0.5nm resolution Extreme Ultra-Violet (EUV) tunable light source
(TLS) and detection system is designed to operate in the 10-200nm range.
The system includes a flow lamp, a 1/3 meter vacuum monochromator with
motor drive, a NIST traceable micro-channel plate detector (MCP), LabviewTM software
and controlling electronics.
The light source will be set to the Helium 30nm line with intensity peaks
in the 104 photons per second range.
The various subsystems are listed below:
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1/3 meter concave holographic gold coated grating vacuum monochromator
VM327
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RF powered ultra low noise Helium Flow lamp with power supply and housing
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Micro-Channel plate inside a metal housing attachable to external vacuum
system
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MCP power /amplifier blue box (inside the rack)
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PC controlled Motor Drive (inside the rack)
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PC controlled data acquisition system (inside the rack)
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Software for simultaneous data acquisition and wavelength scanning.
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Compact vacuum station with pressure gauges (not completely visible on
right)
Specifications:
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Resolution:
6 Angstroms with 500um slit, 1nm with 1mm slit
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Spectral range:
10-2000 Angstroms
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Photon Flux for 30 nm line:
~6.12e+4 Photons/sec/cm^2
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Photon Flux for 58 nm line:
~2.28e+7 Photons/sec/cm^2
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30 nm line strength in Rayleigh: 38.45 Rayleigh
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58 nm line strength in Rayleigh: 14.32 kRayleigh
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Pressure:
~1e-5 mbar
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Available speeds:
20, 10, 4, 2, 1, 0.3, 0.16 Angstroms/sec
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Speeds suitable for recording data:
2, 1, 0.3 Angstroms/sec
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Step size for stepping motor:
0.25 Angstroms
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A to D:
12 Bit
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Voltage range for differential operation at the lowest gain:
+/- 20 Volts
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Voltage range for single ended operation:
+/- 10 Volts
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Suitable voltage for MCPto measure 30 nm line:
1100 Volts
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Suitable voltage for MCPto measure 58 nm line:
900 Volts
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Suitable pressure for operation:
8.6 e-4 mbar
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Differential gains available:
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1 (+/-20V)
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2
(+/- 10V)
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4
(+/- 5V)
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10
(+/- 2V)
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20
(+/- 1V)
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Single-Ended
(+/- 10V)
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Minimum voltage resolution = 0.5 mV (using gain 20)
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STEVEN SEPVEST CORP.
