REX - 4真空紫外光源系统
Resonance的REX-4是广泛用于半导体清洗的大功率真空紫外光源系统，它采用射频激发氙气产生158nm到190nm的真空紫外光，高能量紫外线可使化学残留物分解成挥发性气体二氧化碳、一氧化碳、水蒸气等，190nm以下的真空紫外光使空气电离产生臭氧，臭氧极强的氧化能力也可使化学残留物氧化变成挥发性气体，起到清洗的目的，对物体表面的最难清洗的油脂及有机污染物清洗效果极佳。REX-4可靠性高，无需维护。REX-4标准产品带有350 x 400 mm 的法兰，光源口径230 mm，可以根据用户需要定制法兰或光源口径。
REX-4同普通实验室用的真空紫外光源的主要区别在于其高功率和大辐照面积。
应用领域：
1. 半导体
 | 半导体基片和光刻薄膜的清洗 Dry cleaning surface of silicon wafers and photo-resist films |
| 干刻清洗光刻掩模Dry cleaning lithography masks |
| 后CMP清洗 Post CMP dry cleaning |
| 高K材料的表面处理 Surface conditioning of high K materials |
| 紫外清洗层间绝缘 UV dry cleaning of interlayer dielectric (SOG) |
| 光学化学气相沉积 Optical chemical vapor deposition (CVD) |
| PMMA强化 PMMA conditioning (resist smoothing) |
| 半导体晶圆切割后清洗 Post dicing dry cleaning of tape residues |
| 焊接前清洗 Pre-wire bonding dry cleaning |
| 引线架清洗 Dry cleaning of backside of lead frames |
2. 等离子体显示
| 光刻或镀膜前清洗 Pre-photo-resist, Pre-sputtering dry cleaning |
| 湿法清洗前后的干刻清洗 Dry cleaning before and after wet cleaning to improve yield |
| PDP荧光测试系统 PDP phosphor evaluation systems using Excimer lamps and fiber optic UV delivery systems |
3. 环境和医疗
| 有毒废物处理 Toxic waste (e.g. CFC's, PCB's, dioxin's, trichloroethylene) destruction in air/water streams by photo-oxidation |
| 机械零件的干洗 Non solvent cleaning: of mechanical parts |
| 医疗器械的紫外和臭氧消毒 UV/Ozone sterilization of medical instruments and medical supplies |
| 清洗玻璃板、PDP和液晶显示器 Cleaning glass boards, PDP Fluorescent light and LCD |
4. 其它
| 光刻薄膜的曝光修补Improvement for non-exposed part surface of photo-resist film |
| 软灰化Soft-Ashing |
| 碟片表面处理 Pre-treatment of disc surfaces, i.e., CD and DVD |
| 硬盘中轴承的干洗 Dry cleaning ball bearings for hard disk drives |
| 等离子刻蚀的辅助灯 Igniter and stabilizer for plasma etcher (Excimer used as an assist light) |
| CMP后处理 Post-process treatment of CMP hardening of coatings and adhesives |
| 非晶态材料的生成 Generation of amorphous material, such as amorphous silicon solar cell |
| 印刷 Printing - textile printing, finishing, printed circuits |
| 表面改性 Reforming surfaces - ceramics, surface etching |
| 环境清洁 Environmental CLEAN UP |
性能指标：
臭氧发生效率–
使用干燥的氧气不断流入样品室，R标准产品可以在400秒内产生1克臭氧。通常采用干燥的氮气或氩气清洗，以最大限度容许真空紫外光传送。
透过石英窗真空紫外光(172nm)透射强度:
无石英窗真空紫外光(172nm)透射强度:
光谱:
|
Specification
|
Minimum
|
Typical
|
Maximum
|
units
|
|
Gas Fill
|
|
Xenon
|
|
NA
|
|
Window Material
|
|
SS Qtz
|
|
NA
|
|
Number of Lamp tubes
|
NA
|
4
|
NA
|
|
|
Clear Aperture of window
|
|
23 cm circle
|
23 cm square
|
cm
|
|
Plasma diameter inside lamp tubes
|
22
|
23
|
24
|
mm
|
|
Plasma length inside lamp tubes
|
22
|
23
|
24
|
cm
|
|
Spectral Output (half power points)
|
|
164-177
|
-
|
nm
|
|
Peak wavelength
|
-
|
172
|
-
|
nm
|
|
VUV average intensity across input
aperture (207 W input)
|
8.5
|
12
|
15
|
mW per cm^2
|
|
Certification
|
NIST Traceable Calibration of Intensity
|
|
Output area
|
|
415.5
|
65
|
cm^2
|
|
Input Power
|
200
|
210
|
220
|
Watts
|
|
Input Voltage
|
95
|
115
|
125
|
VAC
|
|
Input Current
|
2
|
2.4
|
3.5
|
ACA
|
|
Input Line Frequency
|
50
|
60
|
65
|
Hz
|
|
Mounting Flange
|
Customizable Al plate with 8 inch
aperture
|
|
Cooling
|
Forced air
|
|
Intensity Monitor
|
Intensity monitor available as an
option
|
|
Thermal Control
|
na
|
|
Pulse
|
Modulation input
|
|
System
|
Complete system includes power supply,
EMI shielded enclosure, Vacuum flange and NIST Traceable calibration
|
|
Safety on/off
|
TTL
|
|
Power on/off
|
TTL
|
|
Computer Interface (Optional)
|
|
RS-232 (Optional)
|
|
Sensor Outputs (Optional)
|
| Lamp
VUV and lamp intensity warning |
| Output
through RS-232 |
|
|
Dimension
|
Description
|
Value
|
units
|
|
A
|
Stainless Steel Enclosure Box Width
|
382
|
mm
|
|
B
|
Stainless Steel Enclosure Box Height
|
250
|
mm
|
|
C
|
Optical Aperture Max. Width, Length or
Diameter
|
230
|
mm
|
|
D
|
Window Retainer Flange Thickness
|
7
|
mm
|
|
E
|
Bottom Flange Thickness
|
10
|
mm
|
|
F
|
Flange Width (customizable)
|
430
|
mm
|
|
G
|
Flange Length (customizable)
|
380
|
mm
|
|
H
|
Stainless Steel Outer Enclosure Box
Length
|
290
|
mm
|
|
I
|
Location of Optical Centerline in
Length
|
190
|
mm
|
|
J
|
Location of Optical Centerline in Width
|
240
|
mm
|
|
Tolerances
|
|
+/- 0.25
|
mm
|
|
Materials
|
|
Window
|
Suprasil Quartz (optional)
|
|
Body
|
Stainless Steel
|
|
Mass
|
15 kg
|
|
Vacuum
Adaptors
|
6061 Al Interface Plate (SS optional)
|
|
Bolt
Pattern of Main Flange
|
Customizable
|
|
|
|
|
|
|
STEVEN SEPVEST CORP.
